Until now, while most scholars pay

Until now, while most scholars pay their attention on the preparation of ITO target based on single size powders17,18, preparing ITO target based on two kinds of powders with different particle sizes has gained a little attention. Two kinds of ITO powders with suitable particle size ratio will contribute to forming a dense structure. In this work, 44 nm yellow ITO spherical particles and 285 nm blue ITO submicro-spheres23 have been prepared by coprecipitation method and solvothermal method. Polyvinyl pyrrolidone (PVP) and Polyvinyl alcohol (PVA) were used a dispersant and adhesive. The effects from PVP, PVA, sintering temperature and holding time have been systematically investigated. Significantly, a new strategy of binary-size particles system has been proposed and discussed systematically for fabricating fine grain, high density and low resistivity ITO target.